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esfandiari M, Asadi R, heydari P, shamsi A. Fabrication of deformable polymer micro-mirror with electrostatic actuation. ICOP & ICPET _ INPC _ ICOFS 2014; 20 :1349-1352
URL: http://opsi.ir/article-1-224-en.html
URL: http://opsi.ir/article-1-224-en.html
Abstract: (4960 Views)
In this paper,a novel method for fabrication of a polymeric deformable micro-mirror with electrostatic actuator is presented.Electrostatic actuators are a desirable choice for micro-mirrors due to their accurate deformation control and simple fabrication process.Despite these promising the development of the electrostatic actuator is limited because of for high actuation voltage.To solve this problem,we utilize metalized thin SU-8 diaphragm as deformable mirror.but the Surface roughness of polymeric mirror is lower than silicon ones.in this paper we propose the fabrication method to overcome this problem.Furthermore the proposed method has using a fast and low-cost fabrication method by the high quality of surface mirror.
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