Optics and Photonics Society of Iran

Abstract. One of the important challenges in fabricating of organic semiconductor devices is providing a suitable substrate. In this research providing of a transparent electrode as a substrate for OLED fabrication is investigated. So we deposit a film of ITO on the glass substrate and improve it by ion bombardment and alumina micro powder bombardment surface treatment methods. The electrode transmittance spectrum in visible range, is measured by double beam spectrometer. Also the surface resistance is measured by four point probes system. The quality of substrate surface is investigated by AFM microscopy. Investigations show that the roughness and pick to valley parameters extremely improved after surface treatment process. After this investigations, we use these substrates to fabricating OLEDs to show the efficiency of these methods practically by measuring voltage-current characteristic.