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Khajehmirzaei M R, Niknam A R. Study of electron density and temperature in the chamber of the rectangular surface wave plasma source using the finite-difference method. ICOP & ICPET _ INPC _ ICOFS 2015; 21 :157-160
URL: http://opsi.ir/article-1-498-en.html
URL: http://opsi.ir/article-1-498-en.html
Abstract: (4757 Views)
Since the plasma sources have many applications, they have been widely interested in recent years. In this article, by presenting a three-dimensional (3-D) and self-consistent model of the rectangular surface wave plasma source, the plasma fluid equations are discretized by the finite-difference (FD) method in the chamber of the plasma source. Following this, the differential relations resulted from the nonlinear PDEs are solved by the relaxation method for the two plasma parameters, plasma density and electron temperature, in three dimensions. The problem is studied for the two different values of argon gas pressure in the plasma chamber.
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