Optics and Photonics Society of Iran

In this research, we have reported the design and fabrication of a dual band antireflection 13 layers stack by DLC protective coating for 3-5 and 8-12 μm and for incident angle. This stack has deposited on ZnSe substrate in two stages at a pressure about 10^-6 mbar by using Electron gun andd PECVD methods. Optical and crystal monitoring have been used to control the thickness of the layers. High advantages of this stack are high environment durability, mechanical hardness (for DLC protective coating) and 2.5% mean reflection in the ranges of 3-5 and 8-12 μm. Adhesion, abrasion, humidity, salt fog and solubility of this stack were studied. The final stack has successfully passed the mentioned tests.