fa An Optical Accelerometer Based on Wavelength Modulation of Light تخصصی Special پژوهشي Research <p dir="ltr"><em>In this paper, we propose an ultrasensitive optical Micro-Electro-Mechanical-System (MEMS) accelerometer based on wavelength modulation, using one dimensional photonic crystal (PC). An air-dielectric multi-layer Photonic Band Gap (PBG) material, a typical Laser diode (LD) light source, a Photo Diode and integrated optical waveguides build up the optical sensing system of the proposed device. Functional characteristics of the proposed accelerometer are as follows: a mechanical sensitivity of </em><img alt="AWT IMAGE" height="17" src="file:///C:/Users/nasib/AppData/Local/Temp/msohtmlclip1/01/clip_image002.gif" width="59" ><em>, an optical sensitivity of </em><img alt="AWT IMAGE" height="17" src="file:///C:/Users/nasib/AppData/Local/Temp/msohtmlclip1/01/clip_image004.gif" width="59" ><em>&nbsp;and a linear measurement range of </em><img alt="AWT IMAGE" height="15" src="file:///C:/Users/nasib/AppData/Local/Temp/msohtmlclip1/01/clip_image006.gif" width="24" >&nbsp;to <img alt="AWT IMAGE" height="17" src="file:///C:/Users/nasib/AppData/Local/Temp/msohtmlclip1/01/clip_image008.gif" width="32" ><em>. Regarding to the mentioned characteristics, the proposed MOEMS accelerometer is suitable for a wide range of applications such as inertial navigation, consumer electronics, automotive, etc.</em></p> <p dir="ltr" style="text-align: justify;"><em>In this paper, we propose an ultrasensitive optical Micro-Electro-Mechanical-System (MEMS) accelerometer based on wavelength modulation, using one dimensional photonic crystal (PC). An air-dielectric multi-layer Photonic Band Gap (PBG) material, a typical Laser diode (LD) light source, a Photo Diode and integrated optical waveguides build up the optical sensing system of the proposed device. Functional characteristics of the proposed accelerometer are as follows: a mechanical sensitivity of </em><img alt="AWT IMAGE" height="17" src="file:///C:/Users/nasib/AppData/Local/Temp/msohtmlclip1/01/clip_image002.gif" width="59" ><em>, an optical sensitivity of </em><img alt="AWT IMAGE" height="17" src="file:///C:/Users/nasib/AppData/Local/Temp/msohtmlclip1/01/clip_image004.gif" width="59" ><em>&nbsp;and a linear measurement range of </em><img alt="AWT IMAGE" height="15" src="file:///C:/Users/nasib/AppData/Local/Temp/msohtmlclip1/01/clip_image006.gif" width="24" >&nbsp;to <img alt="AWT IMAGE" height="17" src="file:///C:/Users/nasib/AppData/Local/Temp/msohtmlclip1/01/clip_image008.gif" width="32" ><em>. Regarding to the mentioned characteristics, the proposed MOEMS accelerometer is suitable for a wide range of applications such as inertial navigation, consumer electronics, automotive, etc.</em></p> Micro-electro-mechanical systems (MEMS), accelerometer, wavelength modulation, PC, sensitivity Micro-electro-mechanical systems (MEMS), accelerometer, wavelength modulation, PC, sensitivity 1129 1132 http://opsi.ir/browse.php?a_code=A-10-1-1284&slc_lang=fa&sid=1 Arash Sheikhaleh Arash Sheikhaleh 10031947532846005911 10031947532846005911 Yes Shahid Beheshti University Shahid Beheshti University Kambiz Abedi k_abedi@sbu.ac.ir 10031947532846005912 10031947532846005912 No Shahid Beheshti University Shahid Beheshti University Kian Jafari Kian Jafari 10031947532846005913 10031947532846005913 No Shahid Beheshti University Shahid Beheshti University