fa بهبود ویژگی های سطحی الکترود شفاف دیودهای نورگسیل آلی به دو روش بمباران یونی و بمباران با میکروپودر آلومینا تخصصی Special پژوهشي Research <p align="justify" dir="rtl" style="margin-top: 0.13in; margin-bottom: 0.13in; line-height: 100%"><font face="B Nazanin"><font size="2" style="font-size: 10pt"><span lang="ar-SA"><b><span lang="fa-IR">یکی</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">از</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">چالشهای</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">مهم</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">در</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">ساخت</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">قطعات</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">نیمرسانای</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">آلی،</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">ساخت</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">یک</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">زیر</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">لایه</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">ی</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">مناسب</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">است</span></b></span></font></font><font size="2" style="font-size: 9pt"><i>. </i></font><font face="B Nazanin"><font size="2" style="font-size: 10pt"><span lang="ar-SA"><b><span lang="fa-IR">در</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">این</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">پژوهش</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">آماده</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">سازی</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">یک</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">الکترود</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">شفاف</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">به</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">عنوان</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">زیرلایه</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">جهت</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">ساخت</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">یک</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">دیود</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">نورگسیل</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">آلی</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">مورد</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">بررسی</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">قرار</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">گرفته</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">است</span></b></span></font></font><font size="2" style="font-size: 9pt"><i>. </i></font><font face="B Nazanin"><font size="2" style="font-size: 10pt"><span lang="ar-SA"><b><span lang="fa-IR">به</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">این</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">منظور،</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">ابتدا</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">یک</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">لایه</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">نازک</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">از</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">اکسید</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">قلع</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">و</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">ایندیوم</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font></b></span></font></font><font size="2" style="font-size: 9pt"><i>(ITO) </i></font><font face="B Nazanin"><font size="2" style="font-size: 10pt"><span lang="ar-SA"><b><span lang="fa-IR">را</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">روی</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">بستره</span></b></span></font></font><font size="2" style="font-size: 9pt"><i>&shy;</i></font><font face="B Nazanin"><font size="2" style="font-size: 10pt"><span lang="ar-SA"><b><span lang="fa-IR">ای</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">از</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">شیشه</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">انباشت</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">نمودیم</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">و</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">سپس</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">با</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">دو</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">فرآیند</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">بمباران</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">یونی</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">و</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">بمباران</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">توسط</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">میکروپودر</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">آلومینا</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">سطح</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">آن</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">را</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">بهبود</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">بخشیدیم</span></b></span></font></font><font size="2" style="font-size: 9pt"><i>. </i></font><font face="B Nazanin"><font size="2" style="font-size: 10pt"><span lang="ar-SA"><b><span lang="fa-IR">طیف</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">عبور</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">الکترود</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">در</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">ناحیه</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">مرئی</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">به</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">وسیله</span></b></span></font></font><font size="2" style="font-size: 9pt"><i>&shy;</i></font><font face="B Nazanin"><font size="2" style="font-size: 10pt"><span lang="ar-SA"><b><span lang="fa-IR">ی</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">دستگاه</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">طیف</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">سنج</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">دوپرتویی</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">اندازه</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">گیری</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">شد</span></b></span></font></font><font size="2" style="font-size: 9pt"><i>. </i></font><font face="B Nazanin"><font size="2" style="font-size: 10pt"><span lang="ar-SA"><b><span lang="fa-IR">همچنین</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">مقاومت</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">سطحی</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">پوشش</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">توسط</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">دستگاه</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">پروب</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">چهارسر</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">اندازه</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">گیری</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">شد</span></b></span></font></font><font size="2" style="font-size: 9pt"><i>. </i></font><font face="B Nazanin"><font size="2" style="font-size: 10pt"><span lang="ar-SA"><b><span lang="fa-IR">کیفیت</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">سطح</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">قطعه</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">توسط</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">تصاویر</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">میکروسکوپ</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font></b></span></font></font><font size="2" style="font-size: 9pt"><i>AFM </i></font><font face="B Nazanin"><font size="2" style="font-size: 10pt"><span lang="ar-SA"><b><span lang="fa-IR">بررسی</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">شد</span></b></span></font></font><font size="2" style="font-size: 9pt"><i>. </i></font><font face="B Nazanin"><font size="2" style="font-size: 10pt"><span lang="ar-SA"><b><span lang="fa-IR">بررسی</span></b></span></font></font><font size="2" style="font-size: 9pt"><i>&shy;</i></font><font face="B Nazanin"><font size="2" style="font-size: 10pt"><span lang="ar-SA"><b><span lang="fa-IR">ها</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">نشان</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">داد</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">که</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">انحراف</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">معیار</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">سطح</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">و</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">فاصله</span></b></span></font></font><font size="2" style="font-size: 9pt"><i>&shy;</i></font><font face="B Nazanin"><font size="2" style="font-size: 10pt"><span lang="ar-SA"><b><span lang="fa-IR">ی</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">قله</span></b></span></font></font><font size="2" style="font-size: 9pt"><i>-</i></font><font face="B Nazanin"><font size="2" style="font-size: 10pt"><span lang="ar-SA"><b><span lang="fa-IR">دره</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">پس</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">از</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">انجام</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">عملیات</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">سطحی</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">بهبود</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">چشمگیری</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">داشته</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">است</span></b></span></font></font><font size="2" style="font-size: 9pt"><i>. </i></font><font face="B Nazanin"><font size="2" style="font-size: 10pt"><span lang="ar-SA"><b><span lang="fa-IR">پس</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">از</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">این</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">بررسی</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">ها</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">روی</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">زیرلایه،</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">با</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">به</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">کار</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">بردن</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">آنها</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">در</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">ساخت</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">دیود</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">و</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">اندازه</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">گیری</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">منحنی</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">ولتاژ</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">جریان،</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">افزایش</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">کارایی</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">قطعات</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">را</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">به</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">صورت</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">تجربی</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">نشان</span><font face="Times New Roman, serif"><span lang="fa-IR"> </span></font><span lang="fa-IR">داده</span></b></span></font></font><font size="2" style="font-size: 9pt"><i>&shy;</i></font><font face="B Nazanin"><font size="2" style="font-size: 10pt"><span lang="ar-SA"><b><span lang="fa-IR">ایم</span></b></span></font></font><font size="2" style="font-size: 9pt"><i>. </i></font></p> <p><font size="2" style="font-size: 9pt">Abstract. One of the important challenges in fabricating of organic semiconductor devices is providing a suitable substrate. In this research providing of a transparent electrode as a substrate for OLED fabrication is investigated. So we deposit a film of ITO on the glass substrate and improve it by ion bombardment and alumina micro powder bombardment surface treatment methods. The electrode transmittance spectrum in visible range, is measured by double beam spectrometer. Also the surface resistance is measured by four point probes system. The quality of substrate surface is investigated by AFM microscopy. Investigations show that the roughness and pick to valley parameters extremely improved after surface treatment process. After this investigations, we use these substrates to fabricating OLEDs to show the efficiency of these methods practically by measuring voltage-current characteristic. </font></p> دیودهای نورگسیل آلی, الکترود شفاف, نیمرساناهای آلی, انحراف معیار سطح زیرلایه Organic light emitting diodes, transparent electrodes, organic semiconductor, substrate roughness 373 376 http://opsi.ir/browse.php?a_code=A-10-1-1202&slc_lang=fa&sid=1 hosein zabolian حسین زابلیان zabolian.hh@gmail.com 10031947532846005076 10031947532846005076 Yes دانشگاه اصفهان hamidreza fallah حمید رضا فلاح hfallah@sci.ui.ac.ir 10031947532846005077 10031947532846005077 No دانشگاه اصفهان gholamreza rahimi غلامرضا رحیمی gholamreza192@gmail.com 10031947532846005078 10031947532846005078 No دانشگاه اصفهان